Scalable Disordered Hyperuniform Architectures <i>via</i> Nanoimprint Lithography of Metal Oxides

Fabrication and scaling of disordered hyperuniform materials remain hampered by the difficulties in controlling spontaneous phenomena leading to this novel kind exotic arrangement objects. Here, we demonstrate a hybrid top-down/bottom-up approach based on sol–gel dip-coating nanoimprint lithography for faithful reproduction metasurfaces metal oxides. Nano- microstructures made silica titania can be directly printed over several cm2 glass silicon substrates. First, describe polymer mold fabrication starting from hard master obtained via solid-state dewetting SiGe Ge thin layers SiO2. Then, assess effective character replica role thickness layer oxide replicas presence residual underneath. Finally, as potential application, show antireflective structures silicon. Our results are relevant realistic implementation large scales nano- microarchitectures oxides, thus opening their exploitation framework wet chemical assembly.